XUV/極紫外透射光柵
定制透射光柵，可用于光譜儀，光束輪廓監(jiān)測(cè)和分束。
Ta/SiN雙涂層或SiN單涂層自支撐光柵，具有側(cè)壁粗糙度低，清晰度高等特點(diǎn)，非常適用于XUV衍射實(shí)驗(yàn)
- 產(chǎn)地：
- 型號(hào)：
- 品牌：
產(chǎn)品描述：
- 薄膜上的衍射光柵或自支撐透射光柵
- 1維光柵
? 線
- 2維光柵
? 正方形/棋盤格
? 圓孔
? 以六邊形排列的圓
- 用于光譜學(xué)、極紫外光刻及其他應(yīng)用
- 多用材料可選（Cr, Si, Au, Ni, SiO2, Ir, Diamond)）
規(guī)格參數(shù)：
參數(shù) | 典型值 |
光柵區(qū)域 | Typical 1 x 1 mm, 2 x 2 mm, up to 3 x 3 mm possible |
典型光柵周期 | 100 nm – 10.000 nm |
材料 | e.g. Cr/Au/SiO2 on 100 nm Si3N4，自支撐結(jié)構(gòu)請(qǐng)咨詢 |
典型的支持框尺寸 | 3 x 3 mm or 6 x 6 mm |
用于X射線自由電子激光和高功率激光的金剛石加工案例：
典型應(yīng)用：
- 用于光譜學(xué)、
- 極紫外光刻、極紫外干涉光刻
- 光束輪廓檢測(cè)
- 分束等
- 同步輻射及自由電子激光波前檢測(cè)
資料/文獻(xiàn)：
S. Marathe et al. Development of synchrotron pink beam x-ray grating interferometer at the Diamond Light source I13-2 beamline Developments in X-Ray Tomography XII 11113 (2019) p. 1111319
C. David et al. Differential phase-contrast imaging using a grating interferometer Applied Physics Letters 81 (2002) p. 3287
F. Pfeiffer et al. Phase retrieval and differential phase-contrast imaging with low-brilliance X-ray sources Nature Physics 2 (2006) p. 258
I. Zanette et al. Two-Dimensional X-ray Grating Interferometer Physical Review Letters 105 (2010) p. 248102
Y. Kayser et al. Wavefront metrology measurements at SACLA by means of x-ray grating interferometry Optics Express 22 (2014) p. 9004
S. Rutishauser et al. Exploring the wavefront of hard x-ray free electron laser radiation Nature Communications 3 (2012), p. 947
規(guī)格和參數(shù)
參數(shù) | 典型值 |
光柵區(qū)域 | Typical 1 x 1 mm, 2 x 2 mm, up to 3 x 3 mm possible |
典型光柵周期 | 100 nm – 10.000 nm |
材料 | e.g. Cr/Au/SiO2 on 100 nm Si3N4，自支撐結(jié)構(gòu)請(qǐng)咨詢 |
典型的支持框尺寸 | 3 x 3 mm or 6 x 6 mm |
- 用于光譜學(xué)、
- 極紫外光刻、極紫外干涉光刻
- 光束輪廓檢測(cè)
- 分束等
- 同步輻射及自由電子激光波前檢測(cè)
發(fā)表文章：
S. Marathe et al. Development of synchrotron pink beam x-ray grating interferometer at the Diamond Light source I13-2 beamline Developments in X-Ray Tomography XII 11113 (2019) p. 1111319
C. David et al. Differential phase-contrast imaging using a grating interferometer Applied Physics Letters 81 (2002) p. 3287
F. Pfeiffer et al. Phase retrieval and differential phase-contrast imaging with low-brilliance X-ray sources Nature Physics 2 (2006) p. 258
I. Zanette et al. Two-Dimensional X-ray Grating Interferometer Physical Review Letters 105 (2010) p. 248102
Y. Kayser et al. Wavefront metrology measurements at SACLA by means of x-ray grating interferometry Optics Express 22 (2014) p. 9004
S. Rutishauser et al. Exploring the wavefront of hard x-ray free electron laser radiation Nature Communications 3 (2012), p. 947